SUSS MicroTec

MA/BA6

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MA/BA6 — cnsi.ucsb.edu — Fig. 01MA/BA6cnsi.ucsb.edu^[1]

What is it?

The source lists the SUSS MicroTec MA/BA6 as an aligner in the Quantum Structures Facility equipment set and describes it as a contact aligner for broadband lithography with backside alignment capability.

What can it run?

Process applications and technology nodes documented for this tool.

Broadband lithography

What do the numbers mean?

Performance1

Alignment capability: Backside alignment capability^[1]

Configuration & options2

Type: Contact aligner^[1]
Application: Broadband lithography^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
MA/BA6 Gen4	—	—	—	nist.gov^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the MA/BA6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA/BA6 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MA/BA6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA/BA6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA/BA6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA/BA6 are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]cnsi.ucsb.edu — cnsi.ucsb.educnsi.ucsb.edu
[2]nist.gov — nist.govnist.gov
[3]SUSS MicroTec MA/BA6 Mask Alignment System – Nanofabrication Facility — nff.gmu.edunff.gmu.edu
[4]Heidelberg University - Zukunft seit 1386 — imseam.uni-heidelberg.deimseam.uni-heidelberg.de