SUSS MicroTec
MA12 Gen3
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The MA12 Gen3 is a mask alignment system from SUSS MicroTec's MA12 series, third generation. The MA12 Gen3 is designed for accurate mask alignment to expose complex structures reliably at high yield.[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Mask alignment lithography
What do the numbers mean?
Optics & imaging1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of lithography system is the SUSS MicroTec MA12 Gen3?
The MA12 Gen3 is a mask alignment system used for imaging in semiconductor lithography.[1]
Not publicly documented
The following facts about the MA12 Gen3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA12 Gen3 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA12 Gen3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA12 Gen3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA12 Gen3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA12 Gen3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]suss.com — suss.comsuss.com
Last updated Sep 21, 2026.
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