Thermo Fisher
Scientific FEI Sirion
What it is
The Thermo Fisher Scientific FEI Sirion is a scanning electron microscope (SEM) used for metrology and inspection applications.[1]
How it works
General reference — not yet source-verifiedSecondary electrons and backscattered electrons emitted from the sample are collected by detectors, forming a grayscale image of the surface topography and composition.
Where it fits in the process flow
General reference — not yet source-verifiedIn semiconductor manufacturing, a scanning electron microscope such as the Sirion is used in the metrology and inspection process step to measure critical dimensions, review defects, and verify process integrity on patterned wafers.
The tool is typically employed after lithographic and etch steps to provide high-resolution imaging of sub-micrometer features.
Applications
General reference — not yet source-verifiedThe Sirion scanning electron microscope is applied to semiconductor wafer and device inspection, as well as materials characterization in research and development environments.
The instrument supports imaging of a wide variety of samples including semiconductors, materials science specimens, and biological samples, with the field emission gun providing high resolution at low voltages.
What do the numbers mean?
Optics & imaging1
- FEI S Column FEG Sirion 4022 261 49401[1]
Configuration & options20
- For Parts[1]
- Ametek PV 7761 / 65 ME[1]
- IGPU[1]
- IGPL[1]
- FEI 4022 262 1720 (3)[1]
- FEI Sirion Module 4022 268 00412[1]
- FEI 4022 261 3756[1]
- FEI 20089 K 9432 034 00201 (2)[1]
- FEI 22609 M[1]
- MDC 997284-2000[1]
- GIP-25-0[1]
- FEI 4035-272-26092 A[1]
- FEI 4022-298-00793[1]
- FEI 4022-293-47911 1027639 6-Ch BSD Amplifier MK3.1[1]
- FEI 4022-261-45692 GIS Rack 60 TE (No Cards)[1]
- Edwards APG-MP-NW 16 ST / ST[1]
- Edwards AIM-SI 1 NW 25[1]
- Edwards IPV 25 PKA[1]
- Edwards APG / MP / NW 16 ST / ST[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Sirion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Sirion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Sirion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Sirion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Sirion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Sirion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Aug 14, 2026.
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