Tokyo Electron
Lithius i+
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tokyo Electron CLEAN TRACK Lithius i+ is a coater/developer system used in semiconductor lithography. The CLEAN TRACK Lithius i+ is built as a 300 mm wafer version. The CLEAN TRACK Lithius i+ functions as a photoresist coater and developer track, and a CLEAN TRACK Lithius i+ was used to spin-coat SOC and SOG underlayer films in a nanoimprint lithography process.[1][2][3]
What it is
The Tokyo Electron Lithius i+ is a photoresist coater and developer track system. The machine is also referred to as a coater/developer. The Lithius i+ is part of the Tokyo Electron CLEAN TRACK series.[4][1][2][3]
The Lithius i+ is a high-reliability and productivity coater developer with a 5C/5D configuration. The system supports 300 mm (12 inch) wafer processing.[4][2]
How it works
The Lithius i+ can also spin-coat spin-on-carbon (SOC) and spin-on-glass (SOG) layers. The coater/developer is used in a nanoimprint lithography process flow to apply transfer layers before imprinting.[1]
Where it fits in the process flow
In the nanoimprint lithography process, the Lithius i+ is used to spin-coat the transfer layers (SOC and SOG) onto the substrate before the imprint step. The system then handles the post-imprint developing of the residual layer.[1]
Applications
The Lithius i+ is used in nanoimprint lithography processes for spin-coating spin-on-carbon and spin-on-glass materials. The coater/developer is also employed in the fabrication of W-damascene interconnect patterns.[1]
What do the numbers mean?
Wafer handling2
Gas & chemistry3
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is the Lithius i+ part of a series?
The Lithius i+ is part of the Tokyo Electron CLEAN TRACK series of coater/developer systems.[1]
Not publicly documented
The following facts about the Lithius i+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Lithius i+ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Lithius i+ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Lithius i+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lithius i+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lithius i+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]iopscience.iop.org — iopscience.iop.orgiopscience.iop.org
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]Equipment inventory listing
Last updated Sep 25, 2026.
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