Tousimis
The Tousimis Automegasamdri-915B is an automated critical point drying system. The Tousimis Automegasamdri-915B can process substrates up to 150 mm wafers. The Tousimis Automegasamdri-915B is used for scanning electron microscopy sample preparation.[1][2]
Plate 01Tousimis AutoMegaSamdri 915B Mems Critical Point Dryer #61892
Plate 02Tousimis Automegasamdri 915B Critical Point Dryer
Critical point dryers are used to dry delicate micro- and nano-scale structures without subjecting them to surface tension forces that can cause collapse or stiction. The process relies on supercritical carbon dioxide to avoid a liquid-gas interface.
Supercritical drying begins by dehydrating the sample in a solvent such as ethanol. The sample is placed in a pressure chamber and the solvent is replaced with liquid carbon dioxide. The chamber is then heated and pressurized above the critical point of carbon dioxide. In this supercritical state, the fluid does not exhibit surface tension. The carbon dioxide is then vented as a gas, leaving the sample dry without the capillary forces that would occur during a liquid-gas phase transition.
The Tousimis Automegasamdri 915B has been used to dry biological biofilm samples on test materials after dehydration in an isopropyl alcohol series, prior to scanning electron microscopy.[2]
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It is used to dry freshly released structures with minimum sticking issues.[3]
It dries samples at the CO2 supercritical point.[3]
Samples are kept in ultra pure ethanol at room temperature before ethanol is substituted by CO2 in its liquid phase.[3]
Pressure and temperature are increased in order to reach the critical phase.[3]
Pressure and temperature are decreased to reach the gaseous phase without directly crossing the liquid-to-gas transition.[3]
The following facts about the Automegasamdri 915B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Automegasamdri 915B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Automegasamdri 915B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Automegasamdri 915B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Automegasamdri 915B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Automegasamdri 915B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 3, 2026.
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