Ulvac

EBX 1000 High Vacuum Evaporation

Deposition Ulvac EBX 1000 High Vacuum Evaporation family

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EBX 1000 High Vacuum Evaporation — Inventory photo — Fig. 01EBX 1000 High Vacuum EvaporationInventory photo^[1]

Power

3 Phase^[1]

Vacuum

Ulvac Cryo-U10PU^[1]

What is it?

The Ulvac EBX 1000 is a high vacuum evaporation system.

What do the numbers mean?

Power & electrical3

Phase: 3 Phase^[1]
Voltage: 200V^[1]
Frequency: 60 Hz^[1]

Vacuum & pumping3

Cryopump: Ulvac Cryo-U10PU^[1]
Oil Rotary Vacuum Pump: Ulvac D-9500K^[1]
Ionization Vacuum Gauge Control: Ulvac GI-Tl3RY^[1]

Control & software7

Speed Control Motor 1: OM MBM 206-411^[1]
Speed Control Motor 2: OM 5IK40RGN-A^[1]
Speed Controller: OM DSP501M^[1]
Control Pack: Om SS21M-SSSD^[1]; Control System:^[1]
Deposition Control: Ulvac CRTM-9000^[1]
Emission Control: Ulvac EGC-10s^[1]

Configuration & options7

Power: 5 kVA^[1]; Motor:^[1]
Oil Mist Trap: Ulvac TMX-Z^[1]
Gear Head 1: Om 2GN120K^[1]
Gear Head 2: OM 5GN60K^[1]; Pro-Face GP577R-TC11^[1]
Heating Electric Power: Shimaden PSH-075TN^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Voltage200V^[1]
Frequency60 Hz^[1]
CryopumpUlvac Cryo-U10PU^[1]
Oil Rotary Vacuum PumpUlvac D-9500K^[1]
Ionization Vacuum Gauge ControlUlvac GI-Tl3RY^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the EBX 1000 High Vacuum Evaporation are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EBX 1000 High Vacuum Evaporation are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EBX 1000 High Vacuum Evaporation is not on record.
Answerable by: an OEM datasheet or a fab qualification report