Varian

E 500 High Current

Ion Implantation Varian E 500 High Current family

Research Quality: 30% complete

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E 500 High Current — Inventory photo — Fig. 01E 500 High CurrentInventory photo^[1]

What is it?

The Varian E 500 High Current Implanter is a high-current ion implanter for 6-inch wafers.

What do the numbers mean?

Vacuum & pumping11

System Vacuum:^[1]
Ion Source Chambe: CCIG/Torr^[1]
Beamline Chamber: CCIG/Torr^[1]
End Station Chamber: CCIG/Torr^[1]; Pumps:^[1]
Stage Pump: iQDP 80+QMB 500^[1]
Loadlock Rough Pump: iQDP 80^[1]
Loadlock Turbo Pump: CT 4 L & CT 4 R: P/N: 8108998G001 & 8108999G001^[1]
Source Turbo Pump: Pfeiffer TPH 1201 P / P/N: PMP 03702^[1]
Resolver Turbo Pump: Pfeiffer HiPace 300^[1]
Beamline Turbo Pump: Pfeiffer HiPace 700Gas Box Upgrade:^[1]

Wafer handling1

Production Wafer Qty': 1 wafer (single platen)^[1]

Control & software2

Implant Monitor: LCD Touchscreen^[1]
Service Monitor: LCD Touchscreen^[1]

Configuration & options6

Signal Tower: Front (Red, yellow, green)^[1]
Platen Type: Electrostatic Clamp^[1]
Loadloack: Left/Right 2 Chambers^[1]
S/w version: 13.30 Rev C^[1]
Source Dry Punp: iQDP 80^[1]
Process Chamber: CT 250 P/N: 8039113^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationSystem Vacuum:^[1]
Ion Source ChambeCCIG/Torr^[1]
Beamline ChamberCCIG/Torr^[1]
End Station ChamberCCIG/Torr^[1]
ConfigurationPumps:^[1]
Stage PumpiQDP 80+QMB 500^[1]
Loadlock Rough PumpiQDP 80^[1]
Loadlock Turbo PumpCT 4 L & CT 4 R: P/N: 8108998G001 & 8108999G001^[1]
Source Turbo PumpPfeiffer TPH 1201 P / P/N: PMP 03702^[1]
Resolver Turbo PumpPfeiffer HiPace 300^[1]
Beamline Turbo PumpPfeiffer HiPace 700Gas Box Upgrade:^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the E 500 High Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 500 High Current are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 500 High Current are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 500 High Current are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the E 500 High Current are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the E 500 High Current is not on record.
Answerable by: an OEM datasheet or a fab qualification report