Varian
Thermal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Varian Thermal is a thermal evaporator used for vacuum deposition of thin films. The Varian Thermal is categorized as a deposition tool. The Varian Thermal includes a Veeco VES 770 Power Supply, a Terranova Wide Range Vacuum Gauge Controller, and an Inficon Deposition Monitor.[1][2][3]
What it is
How it works
The Varian Thermal Evaporator is configured with a Veeco VES 770 power supply, which provides the electrical power for resistive heating of the evaporation source.[1][2]
The system includes a Terranova wide range vacuum gauge controller for monitoring chamber pressure during the deposition process.[1][2]
An Inficon deposition monitor is fitted to measure film thickness and deposition rate in real time.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedThermal evaporators are typically employed in processes that require metallization or dielectric film deposition, often preceding or following photolithography and etching steps in device fabrication.
Applications
The Varian Thermal Evaporator is applied in vacuum deposition applications, including the formation of thin films for electronic and optical devices.[3]
What do the numbers mean?
Power & electrical2
- Veeco VES 770 Power Supply[1]
Vacuum & pumping2
- Terranova Wide Range Vacuum Gauge Controller[1]
Configuration & options5
- Inficon Deposition Monitor[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What power supply is used with the Varian Thermal Evaporator?
What vacuum gauge controller is included?
The system includes a Terranova wide range vacuum gauge controller.[1][2]
What deposition monitor is fitted to the system?
The system is fitted with an Inficon deposition monitor.[1][2]
What is the primary application of this evaporator?
The Varian Thermal Evaporator is used for vacuum deposition applications.[3]
Not publicly documented
The following facts about the Thermal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Thermal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Thermal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Thermal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Thermal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Thermal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Thermal — Varian | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Varian Thermal Evaporator for Vacuum Deposition Applications — spwindustrial.comspwindustrial.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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