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Veeco

IBS-2 Ion Beam

DepositionVeeco IBS-2 Ion Beam family
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IBS-2 Ion Beam — Inventory photo
Fig. 01IBS-2 Ion BeamInventory photo[1]

Power

New Generator[1]

Vacuum

Refurbished Turbo pump[1]

What is it?

Veeco IBS-2 Ion Beam Deposition (IBD) is a deposition system with 6-inch wafer size support.

What do the numbers mean?

Power & electrical2

Handful of parts have been upgraded including a new RF Generator[1]
Accurate?
New Generator[1]
Accurate?

Vacuum & pumping3

Refurbished Turbo pump[1]
Accurate?
2 Cryo pumps[1]
Accurate?
2 Edwards XDS10 Scroll pumps[1]
Accurate?

Wafer handling1

6” Chuck for round wafers and 7” chuck for square wafers[1]
Accurate?

Configuration & options6

6 targets[1]
Accurate?
Two ion guns[1]
Accurate?
2 fully functional Ion beams w/ 6 targets[1]
Accurate?
Plasma Bridge Neutralizer[1]
Accurate?
Chiller Unit[1]
Accurate?
New Air Compressor[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationHandful of parts have been upgraded including a new RF Generator[1]
  • ConfigurationNew Generator[1]
  • ConfigurationRefurbished Turbo pump[1]
  • Configuration2 Cryo pumps[1]
  • Configuration2 Edwards XDS10 Scroll pumps[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the IBS-2 Ion Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IBS-2 Ion Beam are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IBS-2 Ion Beam are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IBS-2 Ion Beam are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IBS-2 Ion Beam are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IBS-2 Ion Beam is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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