YES

1224 P

Deposition YES 1224 P family

Research Quality: 30% complete

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1224 P — Inventory photo — Fig. 011224 PInventory photo^[1]

Power

40 kHz^[1]

Vacuum

Adixen Pascal 2021C2 vacuum pump (2)^[2]

Gas delivery

Software Specifications:^[1]

Optics

0-999999^[1]

What is it?

The Yes 1224 P is a CVD (chemical vapor deposition) system.

What do the numbers mean?

Power & electrical4

Power Requirements: 208 VAC, 50/60 Hz, Single Phase, 25 FL Amps^[1]
RF Plasma Frequency: 40 kHz^[1]
RF Plasma Power: 10-1000 Watts^[1]
Voltage: 208V, 50/60Hz^[2]

Vacuum & pumping1

Adixen Pascal 2021C2 vacuum pump (2)^[2]

Accurate?

Gas & chemistry5

Mass Flow Controls: Software Specifications:^[1]
Chemical Usage: Typical process 3-5 ml^[1]
Chemical Volume Control: Control down to 0.1 ml^[1]
Process Gas Inputs: 1^[1]
Plasma Gas Inputs: 3^[1]

Optics & imaging2

Range of Exposure Time: 0-999999^[1]
Resolution of Timer Setting: 1 second^[1]

Performance1

Uniformity: ±5°C during dwell after stabilization period^[1]

Control & software2

Number of Recipes: 6 CVD, 4 Plasma^[1]; AMI 286 liquid level controller^[2]

Configuration & options9

Part Number: 900-10580-01^[1]
Clean Room Compatibility: Class 10^[1]
Chamber Material: 316L Stainless Steel^[1]
Chamber Size: 40.6 cm W x 46 cm D x 40.6 cm H (16" x 18" x 16")^[1]
Loading: 4 removable internal stainless steel shelves; up to 16 available configurations^[1]
Filter: 0.5 Micron filter^[1]; Performance Specifications:^[1]
Operation Temperature: Ambient to 205°C^[1]; Advanced Energy PE-1000 AC plasma source, model 315502-005^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power Requirements208 VAC, 50/60 Hz, Single Phase, 25 FL Amps^[1]
Mass Flow ControlsSoftware Specifications:^[1]
RF Plasma Frequency40 kHz^[1]
RF Plasma Power10-1000 Watts^[1]
Chemical UsageTypical process 3-5 ml^[1]
Chemical Volume ControlControl down to 0.1 ml^[1]
Process Gas Inputs1^[1]
Plasma Gas Inputs3^[1]
Voltage208V, 50/60Hz^[2]
ConfigurationAdixen Pascal 2021C2 vacuum pump (2)^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 1224 P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1224 P are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1224 P are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1224 P are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1224 P are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1224 P is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Inventory photo
[3]Inventory photo
[4]Inventory photo
[5]pmd.mri.psu.edu — pmd.mri.psu.edupmd.mri.psu.edu
[6]Vapor Phase Deposition Systems — yieldengineering.com (Dec 8, 2015)web.archive.org