YES
1224 P
The YES 1224 P is a CVD system. The YES 1224 P is a chemical vapor deposition system. The YES 1224 P family includes the 1224 P model.[1][2][3][4]
Power
40 kHz[3]
Vacuum
Adixen Pascal 2021C2 vacuum pump (2)[5]
Performance
600 slides/hr for CVD[3]
Gas delivery
Software Specifications:[3]
Optics
0-999999[3]
What is it?
Applications
The YES 1224 P was later renamed the YES-ÉcoCoat. The YES 1224 P is used for vapor phase deposition for precise surface modification. The YES 1224 P supports coating applications that include DNA and oligonucleotide adhesion, glass slide surface modification, silane coating for MEMS, antifouling coating for medical devices, and copper barrier formation. The YES 1224 P incorporates a plasma cleaning function that cleans the substrate prior to silane vapor deposition.[4]
What do the numbers mean?
Power & electrical8
Vacuum & pumping3
Wafer handling1
Gas & chemistry7
Optics & imaging2
Performance2
Control & software4
- AMI 286 liquid level controller[5]
Configuration & options15
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-ÉcoCoat | — | — | Renamed from the YES 1224 P. | web.archive.org[4] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Lam Research Concept One 200— Same function class: Deposition, nullCompare in depthsource[8]
- Applied Materials Centura 5200 Metal— Same function class: Deposition, nullCompare in depthsource[9]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power Requirements208 VAC, 50/60 Hz, Single Phase, 25 FL Amps[1]
- Mass Flow ControlsSoftware Specifications:[3]
- RF Plasma Frequency40 kHz[3]
- RF Plasma Power10-1000 Watts[3]
- Chemical UsageTypical process 3-5 ml[3]
- Chemical Volume ControlControl down to 0.1 ml[3]
- Process Gas Inputs1[3]
- Plasma Gas Inputs3[3]
- Voltage208V, 50/60Hz[5]
- ConfigurationAdixen Pascal 2021C2 vacuum pump (2)[5]
- Power Requirements (first listing)208 VAC, 50/60 Hz, Single Phase, 25 FL Amps[3]
- Power Requirements (second listing)208 VAC, 30 A, 60 Hz, Single Phase, 4835 Watts[3]
- Chemical Usage (typical process)3-5 ml[3]
- Vent Gas Consumption10 SCF run average[3]
- Reactant Gas Consumption4.2 x 10-3 SCF (based on standard process: 170°C @ 1000 W w/20 SCFM pump)[3]
- Vacuum PumpAdixen Pascal 2021C2 vacuum pump (2)[5]
- Power Requirements208 VAC, 30 A, 60 Hz, Single Phase, 4835 Watts[3]
- Power SupplyAutomatic Frequency Tuning[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How is the YES 1224 P configured for loading and recipes?
The YES 1224 P uses 4 removable internal stainless steel shelves with up to 16 available configurations. The YES 1224 P supports 6 CVD recipes and 4 plasma recipes.[3]
Not publicly documented
The following facts about the 1224 P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1224 P are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1224 P are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1224 P are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1224 P is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1224 P are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]YES 1224 P family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]web.archive.org — yieldengineering.com (Dec 8, 2015)web.archive.org
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]Equipment inventory listing
- [9]Equipment inventory listing
- [10]pmd.mri.psu.edu — pmd.mri.psu.edupmd.mri.psu.edu
Last updated Oct 21, 2026.
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