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450 PB 6-2 P Polyimide

Thermal / DiffusionYES 450 family
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450 PB 6-2 P Polyimide — Inventory photo
Fig. 01450 PB 6-2 P PolyimideInventory photo[1]

What it is

General reference — not yet source-verified

A polyimide bake oven is a thermal processing tool used to heat wafers after polymer coating steps. Polyimide bake ovens in semiconductor manufacturing are used to drive off solvents, promote film densification, and support curing stages for polymer layers. Batch ovens of this class typically process wafers held in carriers rather than exposing one wafer at a time on a hot plate.

Where it fits in the process flow

General reference — not yet source-verified

Polyimide bake ovens are used after wafer coating steps that deposit polymer materials onto the substrate. The bake step commonly sits between coating and later operations such as lithography, etch, metallization, passivation, or packaging related build steps, depending on how the polymer layer functions in the device flow. The thermal step is used to stabilize the film before later process modules handle or pattern the wafer.

Applications

General reference — not yet source-verified

Polyimide bake ovens are used for processes that rely on polyimide and related polymer films on wafers. Typical applications include dielectric layers, stress buffer coatings, protective overcoats, and process layers that support downstream patterning or assembly. Similar ovens can also be used wherever a wafer level polymer film needs solvent removal, soft bake behavior, or cure related thermal treatment.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Non-functioning

What do the numbers mean?

Power & electrical1

Power
220V,30 Amps, 6600 Watts, 50/60 Hz, 1-Phase[1]
Accurate?

Vacuum & pumping1

Vacuum Pump not included[1]
Accurate?

Wafer handling2

Max Capacity
2 cassettes of 6" Wafers[1]
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Wafer sizes
6 inch[2]
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Configuration & options9

Refurbished[2]
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Temperature Range
25 - 450* C[1]
Accurate?
Operating Manual for YES-450[1]
Accurate?
Fully refurbished[1]
Accurate?
Non-functioning[1]
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Make
Yes[2]
Accurate?
Model
450 PB 6-2 P[2]
Accurate?
Operating manual
Operating Manual for YES-450[1]
Accurate?
Condition
Fully refurbished; Non-functioning[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationVacuum Pump not included[1]
  • Power220V,30 Amps, 6600 Watts, 50/60 Hz, 1-Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Why is atmosphere control important in this class of equipment?General reference — not yet source-verified

The surrounding ambient influences oxidation behavior, solvent removal, cure chemistry, film color, adhesion, and final electrical and mechanical properties. Controlled atmosphere operation helps make the thermal result more repeatable.

What process concerns are common for polyimide cure tools?General reference — not yet source-verified

Common concerns include temperature uniformity, ramp control, avoidance of trapped volatiles, minimization of film stress, preservation of adhesion, and consistent cure state across the substrate and from run to run.

Are systems in this class only used for polyimide?General reference — not yet source-verified

No. The same equipment class can be used for a range of thermal treatment duties involving coated, deposited, or otherwise temperature sensitive materials, provided the process chemistry and thermal profile are appropriate for the substrate and film.

Not publicly documented

The following facts about the 450 PB 6-2 P Polyimide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB 6-2 P Polyimide are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 450 PB 6-2 P Polyimide are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 450 PB 6-2 P Polyimide are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 450 PB 6-2 P Polyimide is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 450 PB 6-2 P Polyimide are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
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Last updated Oct 17, 2026.

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