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YES

450 PB 8-2 P-CP Vacuum

Thermal / DiffusionYES 450 family
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The Yes 450 PB 8-2 P-CP Vacuum Oven is a stand-alone vacuum oven. The Yes 450 PB 8-2 P-CP Vacuum Oven is specified for 4-inch, 5-inch, 6-inch, and 8-inch wafers. The Yes 450 PB 8-2 P-CP Vacuum Oven has a 208 V, 3 phase, 150 A power supply.[1]

450 PB 8-2 P-CP Vacuum — Inventory photo
Fig. 01450 PB 8-2 P-CP VacuumInventory photo[1]

Power

208 V, 3 Phase, 150 A[1]

Vacuum

2 each Scroll Pumps[1]

Gas delivery

N2, Ar, O2, CDA[1]

What it is

The YES 450 PB 8-2 P-CP Vacuum is a stand-alone system for 4, 5, 6, and 8 inch wafers. The YES 450 PB 8-2 P-CP Vacuum uses manual load handling. The YES 450 PB 8-2 P-CP Vacuum is configured for vacuum operation with N2, Ar, O2, and CDA utilities. The YES 450 PB 8-2 P-CP Vacuum is specified with a 208 V, 3 phase, 150 A power supply.[1]

How it works

The YES 450 PB 8-2 P-CP Vacuum is equipped with 2 scroll backing pumps. The YES 450 PB 8-2 P-CP Vacuum supports N2, Ar, O2, and CDA connections. The YES 450 PB 8-2 P-CP Vacuum includes the SEC / GEM package.[1]

Where it fits in the process flow

General reference — not yet source-verified

Vacuum ovens are commonly placed in process flows after wet coating, cleaning, dispense, or other steps that leave films or structures requiring thermal bake or drying. Vacuum oven processing is also used before later deposition, bonding, packaging, or inspection steps when reduced residual volatiles and controlled thermal exposure are important.

Applications

General reference — not yet source-verified

Vacuum ovens are used for wafer and substrate drying, thermal bake, cure, and degassing tasks in semiconductor and microfabrication work. Vacuum oven processing can be applied to photoresist-related bakes, polymer and adhesive curing, moisture removal, and other treatments where a controlled chamber atmosphere supports the thermal objective.

What do the numbers mean?

Power & electrical2

Power Supply
208 V, 3 Phase, 150 A[1]
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Voltage
208V, 3 Phase[2]
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Vacuum & pumping2

Backing Pumps
2 each Scroll Pumps[1]
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Equipment type
Vacuum Oven[1]
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Wafer handling6

Can Produce Wafers As-Is[1]
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Handler Type
NA, Manual Load[1]
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# of Cassette / FOUP Loaders
1 each 8", 2 each 6"[1]
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Wafer sizes
4, 5, 6, 8 inch[1]
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Condition note
Can Produce Wafers As-Is[1]
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Cassette / FOUP loaders
1 each 8", 2 each 6"[1]
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Gas & chemistry1

Gas
N2, Ar, O2, CDA[1]
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Control & software1

Software options
SEC / GEM Package[1]
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Configuration & options13

High Temp[1]
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Install Type
Stand Alone[1]
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CE Mark Certified[1]
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Decontamination Reports[1]
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All Cables Present[1]
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Manuals included
STD[1]
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SW Options
SEC / GEM Package[1]
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Make
Yes[1]
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Model
450 PB 8-2 P-CP[1]
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Temperature class
High Temp[1]
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Certification
CE Mark Certified[1]
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Documentation
Decontamination Reports; Manuals included: STD[1]
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Vintage
2019[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power Supply208 V, 3 Phase, 150 A[1]
  • Backing Pumps2 each Scroll Pumps[1]
  • GasN2, Ar, O2, CDA[1]
  • Voltage208V, 3 Phase[2]
  • Equipment typeVacuum Oven[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the YES 450 PB 8-2 P-CP Vacuum support?

The YES 450 PB 8-2 P-CP Vacuum supports 4, 5, 6, and 8 inch wafers.[1]

What power supply is specified for the YES 450 PB 8-2 P-CP Vacuum?

The YES 450 PB 8-2 P-CP Vacuum is specified for 208 V, 3 phase, 150 A power.[1]

What vacuum pumping configuration is given for the YES 450 PB 8-2 P-CP Vacuum?

The YES 450 PB 8-2 P-CP Vacuum is specified with 2 scroll backing pumps.[1]

Not publicly documented

The following facts about the 450 PB 8-2 P-CP Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB 8-2 P-CP Vacuum are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 450 PB 8-2 P-CP Vacuum are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 450 PB 8-2 P-CP Vacuum are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 450 PB 8-2 P-CP Vacuum are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 450 PB 8-2 P-CP Vacuum is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Oct 16, 2026.

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