Waferpedia

YES

R3A

Wet Processing / CleanYES R3A family
Research Quality: 30% complete
YESR3A
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What is it?

The source describes the Glen/YES R3A, also called YES-R3, as part of the R-Series plasma cleaning systems. It is identified as the smallest of the series and as being designed for pilot run quantities. The system has two 14 x 14 inch sample trays for a total capacity of 390 square inches.

What can it run?

Process applications and technology nodes documented for this tool.

  • plasma cleaning
  • surface modification

What do the numbers mean?

Configuration & options7

Model designation
Glen/YES R3A[1]
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Alternate designation
YES-R3[1]
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Series
R-Series plasma cleaning systems[1]
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Position in series
smallest of the series[1]
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Intended use
designed for pilot run quantities[1]
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Sample trays
two 14 x 14 inch sample trays[1]
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Total capacity
390 square inches[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the R3A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R3A are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the R3A are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the R3A are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the R3A are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the R3A is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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