Hitachi
SU 8030 FEG-SEM alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
Zeiss
Merlin
4"
Metrology & Inspection
Zeiss MERLIN is a scanning electron microscope at CMi reserved for imaging and process-control inspection, with support for imaging, EDX analysis, and offline analysis in ProSEM.
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
0035235-003 MMD Head
Metrology & Inspection
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.
KLA
1.112 PSL Wafer
Metrology & Inspection
The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.
Zeiss
1430 VP
Metrology & Inspection
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