Hitachi
SU 8030 FEG-SEM
Plate 01Hitachi S-4800 and SU8030 FE-SEM Instructional Video - Northwestern University
NUANCE CenterWatch on YouTubePlate 02Loading the PS8 Prober Shuttle on a Hitachi SU-8030 microscope
KleindiekNanotechnikWatch on YouTube
Wafer size
4"
Power
Requires video amp (P/N536-9800)[1]
Vacuum
TMP Dry Vacuum System[1]
Optics
Hitachi Solid State Backscattered Detector[1]
What is it?
What do the numbers mean?
Power & electrical1
- Requires video amp (P/N536-9800)[1]
Vacuum & pumping1
- TMP Dry Vacuum System[1]
Wafer handling1
Optics & imaging2
Control & software3
Configuration & options12
- 6" Specimen Exchange Airlock[1]
- Beam Deceleration System[1]
- PCI Intergated Data Managment and Image Processing System[1]
- Win XP OS with CD-R/W, Ethernet Card and HD Backup system[1]
- UL and S2-02 Safety Compliance[1]
- Retractable[1]
- For SU8030/SU8040[1]
- Video Amplifier Unit (2-Channel) for SU8000 series[1]
- Required for YAG or SS BSE, TE, or EBIC Imaging[1]
- Haskris Air-Cooled Water Recirculator[1]
- SEMI Standard[1]
- Infrared Chamber Scope[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SU 8030 FEG-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 8030 FEG-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 8030 FEG-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 8030 FEG-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SU 8030 FEG-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SU 8030 FEG-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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