KLA
P/N: 0023889-00 Wafer Vacuum Chuck alternatives
Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.
6 comparable tools
Filmetrics
F50
150mm
Metrology & Inspection
The Filmetrics F50 is an optical film thickness and wafer-mapping system for thickness and optical property measurements on substrates.
KLA
SFS 6420 Wafer
150mm
Metrology & Inspection
KLA
.204 PSL Wafer
Metrology & Inspection
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA
.496 PSL Wafer
Metrology & Inspection
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
KLA
0035235-003 MMD Head
Metrology & Inspection
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.
KLA
1.112 PSL Wafer
Metrology & Inspection
The KLA 1.112 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 inspection systems.
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