Lam Research
SEZ SP 304 alternatives
Comparable Wet Processing / Clean equipment documented in the Waferpedia catalog.
6 comparable tools
Tokyo Electron
Expedius Plus
Wet Processing / Clean
Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.
SCREEN
WS 620 C
Wet Processing / Clean
The SCREEN / DNS WS 620 C is a wet bench specified for 6-inch wafers and described as convertible to 8-inch.
YES
1000FP
Wet Processing / Clean
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
YES
1000P
Wet Processing / Clean
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
Hitachi
1305 BSG 3
Wet Processing / Clean
Hitachi
16036 N
Wet Processing / Clean
The Hitachi 16036 N is a clean bench system.
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