Oxford Instruments
Plasmalab 80 Plus RIE alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Lam Research
Rainbow 4520
8"
Etch
Lam Research Rainbow 4520 is a single-wafer plasma/RIE etching system described as part of the Rainbow 45XX series.
Lam Research
2300
8"
Etch
Lam Research 2300 is an etch system used for pattern transfer in semiconductor processing. It belongs to the class of plasma-based etch equipment used to remove selected material from a wafer according to a patterned mask.
Oxford Instruments
100 ICP Fluorine
Etch
Tegal
1511e
three- to six-inch wafers
Etch
The Tegal 1511e is a tri-electrode dual-frequency plasma etch system for processing three- to six-inch wafers.
Lam Research
2300 e 4 Exelan Flex ES Dielectric
Etch
Lam Research
2300 e 4 Exelan Flex GX Dielectric
Etch
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