Waferpedia

Tool family

AJA ATC

AJADeposition2 entries
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Models in this family

  1. ATC 1500 F

    The AJA ATC 1500 F is a sputter coater with substrate size up to 3 inches.

  2. ATC 2036 E

    The AJA ATC 2036 E is an evaporator with a 15-20 inch adjustable source-to-wafer length.

    Cited variants

    DesignationGenerationVintageChangesSource
    ATC 2030-E HV——6 pocket rotary e-beam source with load-lock, water-cooled substrate holder, and front side radiant substrate heating.web.archive.org[1]
    ATC 2036-E HV——6 pocket rotary e-beam source with 1000°C substrate heating, and programmable linear substrate shutter for wedge films.web.archive.org[1]

All entries

  1. ATC 1500 FAJA

    The AJA ATC 1500 F is a sputter coater with substrate size up to 3 inches.

    CategoryDeposition
    23 specs
  2. ATC 2036 EAJA

    The AJA ATC 2036 E is an evaporator with a 15-20 inch adjustable source-to-wafer length.

    CategoryDepositionWafer15-20” adjustable length from source to wafer
    35 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org