Waferpedia

Tool family

Applied Materials Endura 5500

Models in this family

  1. Applied Materials Endura 5500 is a PVD (Physical Vapor Deposition) system for 8-inch wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Liner/BarrierDescribed as an 8-inch Endura 5500 PVD configuration for liner/barrier use.Equipment inventory listing[1]
    Front-End MetallizationDescribed as an 8-inch Endura 5500 PVD configuration for front-end metallization.Equipment inventory listing[2]
    Aluminum InterconnectDescribed as an 8-inch Endura 5500 PVD configuration for aluminum interconnect.Equipment inventory listing[3]
  2. Applied Materials Endura 5500 TxZ is a PVD sputter (physical vapor deposition) system with multiple chambers, including IMP and TxZ chambers.

All entries

  1. Endura 5500Applied Materials

    Applied Materials Endura 5500 is a PVD (Physical Vapor Deposition) system for 8-inch wafers.

    CategoryDeposition
    27 specs
  2. Endura 5500 HPApplied Materials
    CategoryDeposition
    3 specs
  3. Endura 5500 IMPApplied Materials
    CategoryDeposition
    20 specs
  4. Endura 5500 Metal SputtererApplied Materials
    CategoryDeposition
    7 specs
  5. Endura 5500 TxZApplied Materials

    Applied Materials Endura 5500 TxZ is a PVD sputter (physical vapor deposition) system with multiple chambers, including IMP and TxZ chambers.

    CategoryDeposition
    9 specs

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing