Waferpedia

Applied Materials

Endura 5500

Endura 5500 — Inventory photo
Fig. 01Endura 5500Inventory photo[1]

Power

50 Hz[8]

Vacuum

Dry Pump[8]

What it is

General reference — not yet source-verified

Deposition machines form controlled layers of material on a substrate surface. In semiconductor production, this class of equipment is used to build films that become conductors, barriers, dielectrics, or other functional layers in a device stack.

Such systems are part of the core toolset for thin-film fabrication. They are designed to handle repeatable film formation under controlled process conditions so that the deposited layers support later patterning and integration steps.

How it works

General reference — not yet source-verified

Machines of this class create a process environment in which material is delivered to the substrate and allowed to accumulate as a film. Depending on the deposition method, the material may be supplied as a vapor, plasma-activated precursor, sputtered target material, or other controlled source.

The process is managed by controlling the atmosphere, energy input, and substrate exposure so that the film grows with the desired composition and thickness. Modern deposition tools often use enclosed chambers and automated transfer paths to maintain process cleanliness and repeatability.

Where it fits in the process flow

General reference — not yet source-verified

Deposition is typically performed after surface preparation and before later patterning, etching, planarization, or integration steps. It is used whenever a device structure requires a new layer to be added to the wafer or substrate.

Applications

General reference — not yet source-verified

This class of machine is used to build the layered structures found in semiconductor devices and related precision thin-film products. It supports materials engineering tasks where film composition, continuity, and uniform coverage are important.

  • Liner/Barrier
  • Front-End Metallization
  • Aluminum Interconnect

What do the numbers mean?

Power & electrical1

Line Frequency
50 Hz[8]
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Vacuum & pumping1

Dry Pump[8]
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Wafer handling2

Wafer Shape
SNNF[8]
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Transfer Chamber:[8]
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Control & software1

System Controller[8]
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Configuration & options22

Main AC Power Intel Hole[8]
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Main AC ZCT Box[8]
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Compressor (3)[8]
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Gen Rack[8]
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Heat Exchanger[8]
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Position 1
Dura TTN[8]
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Position 1 Process
Durasource TTN[8]
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Position 2
Aluminum[8]
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Position 2 Process
Durasource AL[8]
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Position 3
Dura TTN[8]
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Position 3 Process
Durasource TTN[8]
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Position 4
Aluminum[8]
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Position 4 Process
Durasource AL[8]
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Buffer Chamber:[8]
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Position A
Pass Thru[8]
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Liner/Barrier[9]
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Front-End Metallization[10]
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Aluminum Interconnect[11]
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AL SPT[1]
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AlCu[12]
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SLAB[13]
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No Chambers[14]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Liner/BarrierDescribed as an 8-inch Endura 5500 PVD configuration for liner/barrier use.Equipment inventory listing[9]
Front-End MetallizationDescribed as an 8-inch Endura 5500 PVD configuration for front-end metallization.Equipment inventory listing[10]
Aluminum InterconnectDescribed as an 8-inch Endura 5500 PVD configuration for aluminum interconnect.Equipment inventory listing[11]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Line Frequency50 Hz[8]
  • ConfigurationDry Pump[8]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What does a deposition system do?General reference — not yet source-verified

It places a controlled thin film of material onto a substrate so that a new functional layer becomes part of the device structure.

Why is this class important in semiconductor manufacturing?General reference — not yet source-verified

Many device features depend on films that conduct current, block diffusion, isolate regions, or serve as the basis for later processing.

What kinds of materials are handled by deposition machines?General reference — not yet source-verified

Machines of this class can be used with metals, dielectric materials, barrier films, and other process-specific coatings, depending on the deposition method.

Where does deposition fit in the fabrication sequence?General reference — not yet source-verified

It is a layer-adding step that is usually placed before subsequent patterning and integration operations.

What is the main process goal of this equipment class?General reference — not yet source-verified

The main goal is to produce a uniform, repeatable film with the composition and structure required by the device process.

Not publicly documented

The following facts about the Endura 5500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura 5500 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Endura 5500 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Endura 5500 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Endura 5500 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Endura 5500 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (15)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]inventory listing
  12. [12]inventory listing
  13. [13]inventory listing
  14. [14]inventory listing
  15. [15]Equipment inventory listing
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Last updated Jul 30, 2026.

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