Tool family
The Applied Materials Reflexion is a chemical mechanical polishing (CMP) system for 12-inch wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Reflexion LK | — | — | listed as a CMP system available from Applied Materials | patents.google.com[1] |
| Reflexion LK Prime | — | — | listed as a CMP system available from Applied Materials | patents.google.com[1] |
| Reflexion | — | — | Configured as 12" Dielectric, LK Oxide. | Equipment inventory listing[2] |
The Applied Materials Reflexion 3600 is a CMP (Chemical Mechanical Polisher).
The Applied Materials Reflexion LK is a chemical mechanical planarization (CMP) system used for wafer surface planarization in semiconductor manufacturing.
The Applied Materials Reflexion is a chemical mechanical polishing (CMP) system for 12-inch wafers.
The Applied Materials Reflexion 3600 is a CMP (Chemical Mechanical Polisher).
The Applied Materials Reflexion LK is a chemical mechanical planarization (CMP) system used for wafer surface planarization in semiconductor manufacturing.