Applied Materials

Reflexion 3600

CMP Applied Materials Reflexion family

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Reflexion 3600 — Inventory photo — Fig. 01Reflexion 3600Inventory photo^[1]

Power

Kaijo 600 (1)^[1]

Gas delivery

AMAT 0040-78378 (3)^[1]

What is it?

What do the numbers mean?

Power & electrical1

Meg Generator: Kaijo 600 (1)^[1]

Wafer handling2

FI robot type / controller: Kawasaki^[1]
Wet robot type: Yaskawa WTM511-2-FWS02-V1-CU/0190-08246 (1)^[1]

Gas & chemistry1

Slurry arm Type: AMAT 0040-78378 (3)^[1]

Control & software4

Reflexion Software: PB59M3i2^[1]
MESA software: CB22M3i2^[1]
ISRM software: IB11g5b^[1]
FI controller: AMAT VMICPCI-7326^[1]

Configuration & options12

CE Segregation (NonCu/Open/Cu): Cu^[1]; SW version:^[1]
Load port: TDK TAS 300 (2)^[1]
Polisher MEI B/D: AMAT 0100-00722 (3)^[1]
Polisher AIO B/D: AMAT 0100-00396 (2)^[1]
Polisher DIO B/D: AMAT 0100-01995 (7)^[1]
Platen Driver: Yaskawa SGDH-75 AE (3)^[1]
Cross Driver: Yaskawa SGDH-08 AE-S (1)^[1]
Pad Conditioner/HCLU Driver: Yaskawa SGDH-01 AE (7)^[1]
Head SWEEP Driver: Yaskawa SGDH-04 AE (4)^[1]
Head Rotation Driver: SE 2 VOSTARCD CR 06250 (4)^[1]
Mega Heater: Orion ETD 232-SA-A-UL (1)^[1]

Interested in this tool?

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

GigaMat 3806 L— Same function class: CMP, UnknownCompare in depthsource^[2]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Meg GeneratorKaijo 600 (1)^[1]
Slurry arm TypeAMAT 0040-78378 (3)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Reflexion 3600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Reflexion 3600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Reflexion 3600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Reflexion 3600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Reflexion 3600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Reflexion 3600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report