Waferpedia

Tool family

ASML Twinscan XT 1250

ASMLLithography2 entries
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Models in this family

  1. Twinscan XT 1250 D
  2. Twinscan XT 1250 D ArF

    The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.

All entries

  1. Twinscan XT 1250 DASML
    CategoryLithographyWaferContinuous clampable wafer table for dry WSs: Absent
    20 specs
  2. Twinscan XT 1250 D ArFASML

    The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.

    CategoryLithography
    1 spec