ASML

Twinscan XT 1250 D

Lithography Continuous clampable wafer table for dry WSs: Absent ASML Twinscan XT 1250 family

Research Quality: 20% complete

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Twinscan XT 1250 D — Inventory photo — Fig. 01Twinscan XT 1250 DInventory photo^[1]

What is it?

What do the numbers mean?

Wafer handling13

Active wafer release for dry WSs: FALSE^[1]
Wafer size: Continuous clampable wafer table for dry WSs: Absent^[1]
Wafer size: Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1^[1]
Wafer Stage Configurations: Wafer Stage type 2 configuration^[1]
Wafer Carrier Locations: Right^[1]
Wafers per Carriers: 25^[1]
Wafer Mark Sensors: Absent^[1]
Wafer Id Readers: Absent^[1]
Wafer Tracks: Present^[1]
Wafer Stage Types: Dual Chuck^[1]
Wafer Stress Relaxations: FALSE^[1]
WH Robot Power Amplifiers: CPM 20^[1]
Wafer size: Wafer Stage Fast Stiff X Move Electronicss: Present^[1]

Optics & imaging1

Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled^[1]

Accurate?

Configuration & options6

with Cymer XLA165^[1]
Track Pre-warning signal (APR)s: APR enabled^[1]; Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track^[1]; INPUT/OUTPUT conflicts enabled^[1]
Lower Docking Plates: Present^[1]
WS Balance Masss: Stainless Steel^[1]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Twinscan XT 1250 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 1250 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 1250 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 1250 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 1250 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan XT 1250 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report