Waferpedia

Tool family

Canon FPA 2500

CanonLithography3 entries
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Models in this family

  1. FPA 2500 i 2

    The Canon FPA 2500 i 2 is a stepper for semiconductor lithography, with documented vintages of 1993 and 1994.

  2. FPA 2500 i 3
  3. FPA 2500 i 3 i-Line

All entries

  1. FPA 2500 i 2Canon

    The Canon FPA 2500 i 2 is a stepper for semiconductor lithography, with documented vintages of 1993 and 1994.

    CategoryLithography
    8 specs
  2. FPA 2500 i 3Canon
    CategoryLithography
    1 spec
  3. FPA 2500 i 3 i-LineCanon
    CategoryLithography
    23 specs