Canon
FPA 2500 i 2
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Canon FPA 2500 i 2 is a stepper for semiconductor lithography. The Canon FPA 2500 i 2 has been observed in configurations with 6-inch and 8-inch wafer sizes. The Canon FPA 2500 i 2 was produced with vintage years of 1993 and 1994.[1][2]
What it is
General reference — not yet source-verifiedThe FPA 2500 i 2 is a stepper used in photolithography, the process of transferring circuit patterns onto a semiconductor wafer. Steppers are a class of lithography equipment that project an image of a reticle onto a wafer through a reduction lens, then step to the next exposure site.
How it works
General reference — not yet source-verifiedA stepper operates by using a light source to illuminate a photomask or reticle, which contains the pattern for one die or a small group of dies. The image is projected through a reduction lens onto a photoresist-coated wafer, which is then stepped to the next die position. The process repeats until the entire wafer is exposed.
Where it fits in the process flow
General reference — not yet source-verifiedSteppers are used in the photolithography stage of semiconductor fabrication, after the wafer has been cleaned and coated with photoresist. After exposure, the wafer moves to development and etching steps. Steppers are typically employed for critical layers where alignment precision and resolution are important.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing chamber and cover
What do the numbers mean?
Wafer handling3
Configuration & options10
Vintage & configurations
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is the FPA 2500 i 2 a stepper?
Yes, the FPA 2500 i 2 is a stepper.[1]
Not publicly documented
The following facts about the FPA 2500 i 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the FPA 2500 i 2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 2500 i 2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the FPA 2500 i 2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 2500 i 2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the FPA 2500 i 2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Equipment inventory listing
- [3]Inventory photo
- [4]f.machineryhost.comf.machineryhost.com
Last updated Oct 11, 2026.
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