Waferpedia

Tool family

CEE 200

CEEThermal / Diffusion2 entries
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Models in this family

  1. 200 Bake Plate

    The CEE 200 Bake Plate is a bake plate for up to 200mm wafers with Internal OS software and 208V power.

  2. 200 Spin

    The CEE 200 Spin is a spin coater with a 1 phase configuration and support for 8 inch wafers.

All entries

  1. 200 Bake PlateCEE

    The CEE 200 Bake Plate is a bake plate for up to 200mm wafers with Internal OS software and 208V power.

    CategoryThermal / DiffusionWafer200mm
    10 specs
  2. 200 SpinCEE

    The CEE 200 Spin is a spin coater with a 1 phase configuration and support for 8 inch wafers.

    CategoryResist Processing
    11 specs