Waferpedia

Tool family

CEE 200

CEE2 entries

Models in this family

  1. The CEE 200 Bake Plate is a bake plate for up to 200mm wafers with Internal OS software and 208V power.

All entries

  1. 200 Bake PlateCEE

    The CEE 200 Bake Plate is a bake plate for up to 200mm wafers with Internal OS software and 208V power.

    CategoryThermal / DiffusionWafer200mm
    3 specs
  2. 200 SpinCEE
    1 spec