Waferpedia

Tool family

Hitachi SU

HitachiMetrology & Inspection3 entries
LinkedIn X Email

Models in this family

  1. SU 8010

    The Hitachi SU 8010 is a scanning electron microscope (SEM).

  2. SU 8030 FEG-SEM

    The Hitachi SU 8030 FEG-SEM is a field emission gun scanning electron microscope.

  3. SU 8040

All entries

  1. SU 8010Hitachi

    The Hitachi SU 8010 is a scanning electron microscope (SEM).

    CategoryMetrology & Inspection
    1 spec
  2. SU 8030 FEG-SEMHitachi

    The Hitachi SU 8030 FEG-SEM is a field emission gun scanning electron microscope.

    CategoryMetrology & InspectionWafer4"
    20 specs
  3. SU 8040Hitachi
    CategoryMetrology & Inspection
    3 specs