SU 8040

The Hitachi SU 8040 is a scanning electron microscope. The Hitachi SU 8040 is categorized under metrology and inspection.^[1][2]

A scanning electron microscope operates by generating an electron beam, focusing that beam onto the sample, and detecting emitted signals as the beam scans across the surface. Image contrast in a scanning electron microscope commonly comes from differences in topography, composition, or electron yield. Scanning electron microscopes usually require conductive handling practice or charge management when nonconductive samples are examined.

Scanning electron microscopes generally sit outside the main production sequence as analytical tools rather than as direct patterning, deposition, or etch tools. Scanning electron microscopes are commonly used after a process step when engineers need visual confirmation of profile shape, surface condition, defect character, or structural change. Scanning electron microscopes can also be used before corrective process adjustments, because the images help relate observed morphology to the preceding fabrication or materials treatment step.

The Hitachi SU 8040 was used in a study of ceramic and resin composite CAD/CAM materials to examine material surfaces by SEM observation. The study used the Hitachi SU 8040 to examine surfaces at ×2000 magnification with the measured voltage set at 5 kV.^[4]