KLA Alpha Step

Models in this family

1. 

   Alpha Step 10-00030
2. 

   Alpha Step 200

   The KLA Alpha Step 200 is a profilometer with a 6" vacuum test chuck and 90-130 VAC, 50/60 Hz, 120 VA max power requirements.

3. 

   Alpha Step 500

   The KLA Alpha Step 500 is a profilometer.

4. 

   Alpha Step D 300 Stylus

   The KLA AlphaStep D-300 is a stylus-based surface profiler that measures step heights from 50 nm to 300 µm.

5. Alpha Step D 500 Wafer Profiler Meter
6. 

   Alpha Step D 600 Stylus Profiler

   The KLA Alpha Step D 600 is a stylus profiler with optical lever sensing, motorized sample stage, side view optics, and profiler 2D acquisition and surface analysis software.

7. 

   Alpha Step IQ Surface