KLA Archer

Models in this family

1. 

   Archer 10 XT Overlay

   The KLA Archer 10 XT Overlay System is a 200mm overlay metrology system with refurbishment-upgraded components and software version 5.6.

2. Archer 100 Overlay
3. Archer 200 Overlay
4. Archer 300 Overlay

   The KLA Archer 300 is an overlay metrology system for optical overlay measurements on 300mm wafers.

5. Archer 500 Overlay Metrology

   The KLA Archer 500 is an overlay metrology system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   KLA Archer 500 Overlay Metrology System - Without HDD	—	—	Described as without HDD.	Equipment inventory listing[1]

6. Archer AIM+ Overlay
7. Archer XT+ Overlay Measurement

   The KLA Archer XT+ is an overlay measurement system.

Sources