Waferpedia

KLA

Archer AIM+ Overlay

Metrology & InspectionKLA Archer family
Research Quality: 10% complete
KLAArcher AIM+ Overlay
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Power

New System power supplies[1]

Optics

Refurbished AMS camera assembly[1]

What is it?

What do the numbers mean?

Power & electrical1

New System power supplies[1]
Accurate?

Vacuum & pumping1

New Pneumatic panel valves & Air / Vac / Exhaust lines fitted[1]
Accurate?

Wafer handling5

Robot Handler Options:[1]
Accurate?
The system can be configured with all handler types[1]
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Dual port 200mm open handler[1]
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Dual port 200mm SMIF handler[1]
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Dual port 300mm Phoenix Yaskawa handler[1]
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Optics & imaging1

Refurbished AMS camera assembly[1]
Accurate?

Control & software2

Software version
5.60[1]
Accurate?
Refurbished system PC with new hard-drives[1]
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Configuration & options7

New / Refurbished Items:[1]
Accurate?
New system consumable parts
Shutter, HLS Lamp & Air Filters[1]
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Refurbished HLS (Halogen Light Source) assembly[1]
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Refurbished X/Y/T stage[1]
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Refurbished IDE flotation table[1]
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Tripel port 300mm Phoenix Kawasaki[1]
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Refurbished[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationNew System power supplies[1]
  • ConfigurationNew Pneumatic panel valves & Air / Vac / Exhaust lines fitted[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Archer AIM+ Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Archer AIM+ Overlay are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Archer AIM+ Overlay are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Archer AIM+ Overlay are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Archer AIM+ Overlay are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Archer AIM+ Overlay is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
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Last updated Jul 29, 2026.

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