KLA Candela CS 20

Models in this family

1. 

   Candela CS 20

   The KLA Candela CS 20 is a metrology and inspection tool family with a 6-inch wafer surface inspection variant. The KLA Candela CS 20 Surface is a bare non-patterned silicon wafer surface defect inspection system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Candela CS 20 Surface	—	—	Surface inspection system variant.	waferpedia.com[1]
   Candela CS 20 R	—	—	Stated to support 6-inch wafers.	waferpedia.com[1]
   Candela CS 20 V	—	—	Metrology and inspection model with source-stated wafer sizes of 4 inch and 6 inch.	waferpedia.com[1]

2. 

   Candela CS 20 R Dual Surface
3. 

   Candela CS 20 R Surface

   The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.

4. 

   Candela CS 20 Surface

   The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.

5. 

   Candela CS 20 V

   KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.

6. 

   Candela CS 20 V Surface Analyzer

   The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Candela CS 20 V	—	—	—	Equipment inventory listing[2]

Sources