Tool family
The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.
The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.
KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.
The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.
The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.
The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.
KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.
The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.