Waferpedia

Tool family

KLA Candela CS 20

Models in this family

  1. The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.

  2. The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.

  3. KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.

  4. The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.

All entries

  1. Candela CS 20 R Dual SurfaceKLA
    CategoryMetrology & Inspection
    4 specs
  2. Candela CS 20 R SurfaceKLA

    The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.

    CategoryMetrology & Inspection
    4 specs
  3. Candela CS 20 SurfaceKLA

    The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.

    CategoryMetrology & Inspection
    2 specs
  4. Candela CS 20 VKLA

    KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.

    CategoryMetrology & Inspection
    9 specs
  5. Candela CS 20 V Surface AnalyzerKLA

    The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.

    CategoryCMPWafer2"
    22 specs