Tool family
The KLA FLX 2320 is a film-stress measurement tool for wafers, using laser-based curvature measurement over temperatures from room temperature to 500 C.
The KLA FLX 2320 A is a thin film stress measurement system.
The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.
The KLA FLX 2320 is a film-stress measurement tool for wafers, using laser-based curvature measurement over temperatures from room temperature to 500 C.
The KLA FLX 2320 A is a thin film stress measurement system.
The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.