KLA FLX 2320

Models in this family

1. FLX 2320

   The KLA FLX 2320 is a film-stress measurement tool for wafers, using laser-based curvature measurement over temperatures from room temperature to 500 C.

2. FLX 2320 Aproduced 1993–

   The KLA FLX 2320 A is a thin film stress measurement system.

3. 

   FLX 2320 A Thin Film Stress Measurement

   The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.

4. 

   FLX 2320 Thin Film Stress Measurement

   The KLA FLX 2320 Thin Film Stress Measurement is a thin film stress measurement system for metrology and inspection.