Waferpedia

Tool family

KLA FLX 2320

KLA4 entries

Models in this family

  1. The KLA FLX 2320 is a film-stress measurement tool for wafers, using laser-based curvature measurement over temperatures from room temperature to 500 C.

  2. The KLA FLX 2320 A is a thin film stress measurement system.

  3. The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.

All entries

  1. FLX 2320KLA

    The KLA FLX 2320 is a film-stress measurement tool for wafers, using laser-based curvature measurement over temperatures from room temperature to 500 C.

    CategoryMetrology & Inspection
    8 specs
  2. FLX 2320 AKLA

    The KLA FLX 2320 A is a thin film stress measurement system.

    CategoryMetrology & Inspection
    1 spec
  3. FLX 2320 A Thin Film Stress MeasurementKLA

    The KLA FLX 2320 A is a thin film stress measurement system manufactured by KLA.

    4 specs
  4. FLX 2320 Thin Film Stress MeasurementKLA
    CategoryMetrology & Inspection
    8 specs