KLA P

Models in this family

1. 

   P 10

   The KLA P 10 is a profilometer in the metrology and inspection category.

2. 

   P 11 Surface
3. P 15 XP Surface

   The KLA P 15 XP is a surface profilometer described as an 8-inch wafer tool and noted as upgraded from the P-10.

4. 

   P 16 + Profiler

   KLA P 16 + Profiler is a metrology and inspection tool with listed wafer sizes from 2 inch to 12 inch.

5. 

   P 16 Surface

   The KLA P 16 Surface is a surface profilometer described as a fully refurbished unit with Windows XP, extended range up to 1 mm, and a 3D option.

6. 

   P 17 Surface

   The KLA P 17 Surface is a surface profilometer.

7. 

   P 170 Surface
8. 

   P 2 Surface
9. 

   P 20 H Profiler
10. 

    P 22 H Surface

    The KLA P 22 H Surface is a surface profilometer with step height precision, dual-view optics, and a motorized 200 mm diameter X-Y vacuum sample stage.

11. 

    P 22 Surface

    The KLA P 22 Surface is a surface profilometer.

12. 

    P 6 Surface

    The KLA P 6 is a surface profilometer.