KLA
P 170 Surface
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe KLA P 170 Surface Profilometer is a metrology and inspection instrument for semiconductor manufacturing.
How it works
General reference — not yet source-verifiedA surface profilometer measures surface topography by sensing height variation across a specimen and converting that information into a profile or map for analysis.
Surface metrology tools in this class are used to evaluate film steps, surface texture, and other height-related features on processed wafers.
Where it fits in the process flow
General reference — not yet source-verifiedA surface profilometer sits in the measurement flow after process steps that can change topography, such as deposition, etch, planarization, or pattern transfer.
Applications
General reference — not yet source-verifiedA surface profilometer is used in process control, film-thickness-related topography checks, step-height measurement, and inspection of surface features on wafers.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Electrical service1 Phase, 3 Wire[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size is the KLA P 170 Surface Profilometer configured for?
The KLA P 170 Surface Profilometer is configured for 6-inch wafers.[1]
What is the machine type of the KLA P 170 Surface Profilometer?
The KLA P 170 Surface Profilometer is a surface profilometer used for metrology and inspection.[1]
Not publicly documented
The following facts about the P 170 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 170 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 170 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 170 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 170 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 170 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 13, 2026.
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