Waferpedia

Tool family

KLA SFS

KLAMetrology & Inspection3 entries
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Models in this family

  1. SFS 6100 Wafer Surface Analysis
  2. SFS 6220 Wafer
  3. SFS 6420 Wafer

All entries

  1. SFS 6100 Wafer Surface AnalysisKLA
    4 specs
  2. SFS 6220 WaferKLA
    CategoryTest & Probe
    9 specs
  3. SFS 6420 WaferKLA
    CategoryMetrology & InspectionWafer150mm
    15 specs