Lam Research

Concept Three Speed

Deposition Lam Research Concept Three family

Research Quality: 30% complete

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Concept Three Speed — Inventory photo — Fig. 01Concept Three SpeedInventory photo^[1]

Power

3 FOUP RF ID Reader^[1]

Vacuum

Port 5^[1]

What is it?

Lam / Novellus Concept Three Speed is a CVD deposition system for 12-inch wafers.

What do the numbers mean?

Power & electrical1

3 FOUP RF ID Reader^[1]

Accurate?

Vacuum & pumping2

WTS Vacuum PEC Location: Port 5^[1]
ATM Robot End Effector: Vacuum^[1]

Wafer handling2

Speed Handler Type: WTS IMM^[1]
Handler Facilities: Bottom^[1]

Control & software5

Primary User Interface: Flat Panel Right^[1]
Software Version: 5.73^[1]
Software Build: 78^[1]
Operating System: Windows XP/2000^[1]
User Interface Type: Ballroom^[1]

Configuration & options10

Triple Speed NF^[1]
Module A Location: Port 2^[1]
Module B Location: Port 3^[1]
Module C Location: Port 4^[1]
Interconnect Cable: Length 75 Feet^[1]
Signal Tower Operation: 3 Color Light Tower(RYG)^[1]; System Power Rack^[1]; Third FOUP Option^[1]
FOUP ID Reader Type: OMRON^[1]; Ionizer Kit^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

WTS Vacuum PEC LocationPort 5^[1]
Configuration3 FOUP RF ID Reader^[1]
ATM Robot End EffectorVacuum^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Concept Three Speed are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Three Speed are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Concept Three Speed are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Concept Three Speed are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Concept Three Speed are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Concept Three Speed is not on record.
Answerable by: an OEM datasheet or a fab qualification report