Lam Research Rainbow 4520

Models in this family

1. 

   4520

   The Lam Research 4520 is an etcher with Envision Software, a Hine cassette indexer load/unload, an entrance loadlock, a remote AC panel, and a main chamber with a top actuate clamping system.

2. 

   4520 ENV

   The Lam 4520 ENV is an etcher identified by model name 4520 ENV.

3. 

   4520 i Oxide

   The Lam 4520 i Oxide Etcher is a 6-inch oxide etcher configured with an ESC clamp type, a bulkhead system mount, and a listed software version of Classic 7,31-42.

4. 

   4520 i XL Stand Alone
5. 

   4520 Oxide
6. 

   4520 XL
7. 

   4520 XLE
8. 

   Rainbow 4520

   Lam Research Rainbow 4520 is a single-wafer plasma/RIE etching system described as part of the Rainbow 45XX series.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Lam Rainbow 45XX Series	—	—	Series described as a fully automated, in-line, single-wafer plasma/RIE etching system with programmable switching between plasma and RIE modes.	allwin21.com[1]

9. Rainbow 4520 i
10. 

    Rainbow 4520 Plasma RIE
11. Rainbow 4520 XL
12. 

    Rainbow 4520 XL Dielectric

    The Lam Rainbow 4520 XL Dielectric is an etch tool for 6-inch wafers.

Sources