Lam Research

4520 i Oxide

Etch Lam Research Rainbow 4520 family

Research Quality: 30% complete

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4520 i Oxide — Inventory photo — Fig. 014520 i OxideInventory photo^[1]

Power

RF power Rack AE PDW2200 RFG1250 13,56MHz^[1]

Vacuum

Low pressure chamber manifold^[1]

What is it?

The Lam 4520 i Oxide Etcher is a 6-inch oxide etcher configured with an ESC clamp type, a bulkhead system mount, and a listed software version of Classic 7,31-42.

What do the numbers mean?

Power & electrical3

RF power Rack AE PDW2200 RFG1250 13,56MHz^[1]
Phase: Main Power 208V, 3 Phase, 5Wire, 175A, 60/^[1]; Dip PCB for RF power tuning^[1]

Vacuum & pumping2

Low pressure chamber manifold^[1]

Accurate?

AC--2 chamber pressure control^[1]

Accurate?

Wafer handling1

Hine 38A open cassette Send/Receive indexers^[1]

Accurate?

Optics & imaging1

Single lower chamber endpoint detector (405/520nm) Non-heated endpoint window^[1]

Accurate?

Control & software1

Software Version: Classic 7,31-42^[1]

Configuration & options12

Bulkhead system mount w/tunnel covers^[1]

Accurate?

Oxide etcher, 6”^[1]

Accurate?

Clamp type, ESC^[1]

Accurate?

AE Isotropic Module^[1]

Accurate?

AC Rack AC Power Distribution^[1]

Accurate?

Back Helium Colling^[1]

Accurate?

Belt driven load station^[1]

Accurate?

Standard load station shuttle spatula^[1]

Accurate?

Upper chamber gap drive encoder^[1]

Accurate?

Aluminum upper chamber electrode^[1]

Accurate?

HPS valve for chamber isolation^[1]

Accurate?

Lower chamber RGA port^[1]

Accurate?

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationRF power Rack AE PDW2200 RFG1250 13,56MHz^[1]
PhaseMain Power 208V, 3 Phase, 5Wire, 175A, 60/^[1]
ConfigurationDip PCB for RF power tuning^[1]
ConfigurationLow pressure chamber manifold^[1]
ConfigurationAC--2 chamber pressure control^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 4520 i Oxide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4520 i Oxide are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4520 i Oxide are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4520 i Oxide are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4520 i Oxide are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4520 i Oxide is not on record.
Answerable by: an OEM datasheet or a fab qualification report