Mattson 2800 RTP

Models in this family

1. 

   2800 RTP

   The Mattson 2800 RTP is a rapid thermal process system for mainstream RTP applications.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   AST 2800 RTP	—	—	Model designation is AST 2800.	waferpedia.com[1]

Sources