Mattson
2800 RTP
What it is
The Mattson 2800 RTP System is a rapid thermal process system.[1]
How it works
The only operating details stated are that the system is a rapid thermal process platform and that it includes an ATM-307-S-CE Robot, an ESC-200 Controller, a Pre 201 Aligner, an ESC-201 Controller, a pneumatic rack, and an EMO power supply.[1]
What do the numbers mean?
Power & electrical1
- EMO Power Supply[1]
Wafer handling1
- ATM-307-S-CE Robot[1]
Control & software2
Configuration & options1
- Pre 201 Aligner[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationEMO Power Supply[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2800 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2800 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2800 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2800 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2800 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2800 RTP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Mattson - Products — mattson.com (May 3, 2003)web.archive.org
Last updated Jul 29, 2026.