Mattson
AST 2800 RTP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mattson AST 2800 RTP is a rapid thermal process system. The Mattson AST 2800 RTP model designation is AST 2800. The Mattson AST 2800 RTP is categorized as Thermal / Diffusion.[1][2]
What it is
How it works
General reference — not yet source-verifiedA rapid thermal process system heats semiconductor substrates quickly and controls temperature with a short high-temperature cycle.
Rapid thermal processing tools are used to apply tightly managed thermal exposure in a process chamber rather than long furnace-style residence times.
Where it fits in the process flow
General reference — not yet source-verifiedThe Mattson AST 2800 RTP sits in the thermal processing portion of a semiconductor fabrication flow.
Rapid thermal processing is used after earlier wafer preparation steps and before later device-processing steps that depend on controlled heat treatment.
Applications
What do the numbers mean?
Configuration & options5
- Refurbished[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AST 2800 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST 2800 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AST 2800 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AST 2800 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AST 2800 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AST 2800 RTP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]Inventory photo
- [4]Steag / AST 2800 RTP — Mattson | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 12, 2026.
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