Waferpedia

Tool family

Mattson AST 2800

MattsonThermal / Diffusion2 entries
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Models in this family

  1. AST 2800 RTP
  2. AST 2800 SMIF RTP

All entries

  1. AST 2800 RTPMattson
    CategoryThermal / Diffusion
    1 spec
  2. AST 2800 SMIF RTPMattson
    CategoryThermal / Diffusion
    5 specs