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Tool family

Mattson AST 2800

MattsonThermal / Diffusion3 entries
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Models in this family

  1. AST 2800

    The Mattson AST 2800 is a thermal processing tool in the AST 2800 family.

  2. AST 2800 RTP

    The Mattson AST 2800 RTP is a rapid thermal process system.

  3. AST 2800 SMIF RTP

    The Mattson AST 2800 SMIF RTP is a rapid thermal process system in the thermal / diffusion equipment class.

All entries

  1. AST 2800Mattson

    The Mattson AST 2800 is a thermal processing tool in the AST 2800 family.

    11 specs
  2. AST 2800 RTPMattson

    The Mattson AST 2800 RTP is a rapid thermal process system.

    CategoryThermal / Diffusion
    5 specs
  3. AST 2800 SMIF RTPMattson

    The Mattson AST 2800 SMIF RTP is a rapid thermal process system in the thermal / diffusion equipment class.

    CategoryThermal / Diffusion
    15 specs