Mattson
AST 2800 SMIF RTP
What it is
How it works
General reference — not yet source-verifiedA rapid thermal process system heats wafers quickly and then cools them under controlled conditions. A thermal / diffusion tool of this class is used for heat treatment steps that change film or substrate properties without the longer soak times of furnace processing.
A SMIF-configured process tool uses enclosed wafer handling to reduce exposure of wafers to ambient particles during transfer and processing. A robot in this class typically moves wafers between the load interface and the process chamber, while factory communication links coordinate the tool with manufacturing systems.
Where it fits in the process flow
General reference — not yet source-verifiedThe Mattson AST 2800 SMIF RTP sits in the thermal processing portion of semiconductor manufacturing. The Mattson AST 2800 SMIF RTP is used for process steps that follow wafer formation or deposition and precede later patterning or integration steps.
The Mattson AST 2800 SMIF RTP fits into a controlled-handling flow that emphasizes clean wafer transfer and automated equipment communication.
Applications
General reference — not yet source-verifiedA rapid thermal process system is used for annealing, activation, oxidation, and other short-duration heat treatments in semiconductor manufacturing. A tool in this class can support thermal modification of wafers while limiting total thermal exposure.
What do the numbers mean?
Power & electrical2
Wafer handling4
- PRI Robot ATM307[1]
Control & software1
Configuration & options8
- PRI Aligner[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AST 2800 SMIF RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AST 2800 SMIF RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AST 2800 SMIF RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AST 2800 SMIF RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AST 2800 SMIF RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AST 2800 SMIF RTP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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