Waferpedia

Tool family

Nikon NSR 2005

NikonLithography4 entries

Models in this family

  1. The Nikon NSR 2005 i 10 C i-Line Stepper is a lithography stepper described with 6-inch wafer size and no wafer handler.

  2. The Nikon NSR 2005 i 12 i-Line Stepper is a lithography stepper configured for 6-inch wafers.

  3. The Nikon NSR 2005 i 9 C i-Line Stepper is an i-line lithography stepper with source-stated configurations for 6-inch and 8-inch wafers.

All entries

  1. NSR 2005 i 10 C i-LineNikon

    The Nikon NSR 2005 i 10 C i-Line Stepper is a lithography stepper described with 6-inch wafer size and no wafer handler.

    CategoryLithographyWaferNo wafer handler
    17 specs
  2. NSR 2005 i 11 D i-LineNikon
    CategoryLithographyWaferWafer Loader
    13 specs
  3. NSR 2005 i 12 i-LineNikon

    The Nikon NSR 2005 i 12 i-Line Stepper is a lithography stepper configured for 6-inch wafers.

    CategoryLithographyWaferWafer Loader
    6 specs
  4. NSR 2005 i 9 C i-LineNikon

    The Nikon NSR 2005 i 9 C i-Line Stepper is an i-line lithography stepper with source-stated configurations for 6-inch and 8-inch wafers.

    CategoryLithographyWaferStandard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it
    26 specs