Tool family
The Nikon NSR 2005 i 10 C i-Line Stepper is a lithography stepper described with 6-inch wafer size and no wafer handler.
The Nikon NSR 2005 i 12 i-Line Stepper is a lithography stepper configured for 6-inch wafers.
The Nikon NSR 2005 i 9 C i-Line Stepper is an i-line lithography stepper with source-stated configurations for 6-inch and 8-inch wafers.
The Nikon NSR 2005 i 10 C i-Line Stepper is a lithography stepper described with 6-inch wafer size and no wafer handler.
The Nikon NSR 2005 i 12 i-Line Stepper is a lithography stepper configured for 6-inch wafers.
The Nikon NSR 2005 i 9 C i-Line Stepper is an i-line lithography stepper with source-stated configurations for 6-inch and 8-inch wafers.