Nikon

NSR 2005 i 9 C i-Line

Lithography Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it Nikon NSR 2005 family

Research Quality: 30% complete

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NSR 2005 i 9 C i-Line — Inventory photo — Fig. 01NSR 2005 i 9 C i-LineInventory photo^[1]

Wafer size

Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it

Power

1750 KW^[2]

Optics

6 inch Reticle^[1]

What is it?

The Nikon NSR 2005 i 9 C i-Line Stepper is an i-line lithography stepper with source-stated configurations for 6-inch and 8-inch wafers.

What do the numbers mean?

Power & electrical2

Lamp power: 1750 KW^[2]; Lamp Power Supply^[2]

Wafer handling3

Wafer size: Standard PDP 11/93 Computer & Silicon Carbide Wafer Loader Type 1 Conversion on it^[1]
Wafer size: Plug & Play Machine running with Type 1 Wafer Loader Silicon Carbide Conversion^[5]
Wafer: 8", OF direction 0*, Ring type wafer^[2]

Optics & imaging10

6 inch Reticle^[1]; 6 inch Reticles^[5]; Upgrade Illuminator Shrinc 1 installed^[5]
Reticle: 6", normal thickness^[2]; Optical system:^[2]
Lens type: 5iB3^[2]
Magnification: 1/5^[2]; Illumination system:^[2]; Masking function^[2]
Reticle Alignment: i-line, CCD imagining^[2]

Control & software6

HDD & Software included^[1]

Accurate?

Nest Manager Computer^[5]

Accurate?

PC hard disk with NEST upgrade^[2]

Accurate?

Air controller^[2]

Accurate?

Control Rack^[2]

Accurate?

PC / Control:^[6]

Accurate?

Configuration & options5

Field size: 21.2 x 25.2mm^[2]
Light source: Mercury lamp^[2]; With:^[2]; SUS Rack^[2]; HDD not included^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Lamp power1750 KW^[2]
ConfigurationLamp Power Supply^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 2005 i 9 C i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 9 C i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 9 C i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2005 i 9 C i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2005 i 9 C i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2005 i 9 C i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report