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Nikon

NSR 2005 i 11 D i-Line

LithographyWafer LoaderNikon NSR 2005 family
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NSR 2005 i 11 D i-Line — Inventory photo
Fig. 01NSR 2005 i 11 D i-LineInventory photo[1]

Wafer size

Wafer Loader

Performance

70nm[2]

Optics

i-line[2]

What is it?

What do the numbers mean?

Wafer handling2

Retical Loader[1]
Accurate?
Wafer size
Wafer Loader[1]
Accurate?

Optics & imaging5

Illumination WL
i-line[2]
Accurate?
Illumination uniformity
2.00%[2]
Accurate?
Reticle size
5"[2]
Accurate?
Lens reduction
1/5[2]
Accurate?
Lens Controller[1]
Accurate?

Performance1

Overlay (single machine)
70nm[2]
Accurate?

Control & software1

Control System
VAX Station[1]
Accurate?

Configuration & options4

CD unifotmity
400nm[2]
Accurate?
Modules:[1]
Accurate?
Operation Panel[1]
Accurate?
AC Power Distribution System
Electricity Box[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 2005 i 11 D i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2005 i 11 D i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 2005 i 11 D i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 2005 i 11 D i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 2005 i 11 D i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 2005 i 11 D i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
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Last updated Jul 29, 2026.

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