Tool family
Onto Innovation NSX 330
Models in this family
The Onto Innovation NSX 330 is an inspection system that supports 4-inch to 12-inch wafers and non-standard wafer types including Mems, Taiko, and Thin.
The Onto / Rudolph / August NSX 330 B is an inspection system with programmable illumination and multiple review modes for whole wafers.
All entries
- NSX 330Onto Innovation
The Onto Innovation NSX 330 is an inspection system that supports 4-inch to 12-inch wafers and non-standard wafer types including Mems, Taiko, and Thin.
CategoryMetrology & InspectionWaferSupports non-standard wafer types (Mems, Taiko, Thin)24 specs - NSX 330 BOnto Innovation
The Onto / Rudolph / August NSX 330 B is an inspection system with programmable illumination and multiple review modes for whole wafers.
CategoryMetrology & InspectionWaferThree simultaneous color defect review methods: on-the-fly, high resolution, whole wafer14 specs